Technical information
E-Beam evaporator
Materials: Au, Ti, Ni, Cr, Al, Pd, Cu
Max sample size: 6" (or 4 x 2")
Tool Overview
Responsible: Johan Stjernholm, David Alcer
Location: Q158: EVA lab
License and Booking Required: Yes
Other Links
Responsible staff
Evaporator - Temescal E-Beam