Technical information
Shottky FEG type SEM, model GeminiSEM 500 from Zeiss. The instrument is mainly intended for analytical work such as EDS, EBSD, it is equipped with the following detectors:
-Everhart-Thornley (E-T)
-In-lens
-BSD (6 segment detector)
-STEM
-EDS
-EBSD
Location: Q260
Tool Overview
Responsible: Peter Blomqvist, Anders Kvennefors
Location: Q260: Hitach and Zeiss SEM
License and Booking Required: Yes
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