Technical information
FEI Nova NanoLab 600. Combined focused ion beam and scanning electron microscope with ultra-high resolution. 3 gas injection sources, W, Au and SiOx. Omniprobe nanomanipulator. Installed 2006. Room Q156, Nano-process lab.
This is the SEM part of the tool in LIMS.
Tool Overview
Responsible: Peter Blomqvist, Simon de Fouw
Location: Q156: EBL room
License and Booking Required: Yes
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