Technical information
High Speed EBL from Raith Company.
Tool Overview
Responsible: Harald Havir, David Alcer
Location: Q241: New EBL
License and Booking Required: Yes
Chemical responsible:
Other Links
Monthly Mode realignment of the LNL modes.
FOM (nm):
| Date | 260831 | 260928 | ||||||||||
| LC_30 | 6.96 | 5.57 | ||||||||||
| LC_40 | 5.68 | 4.88 | ||||||||||
| LC_60 | 4.96 | 5.09 | ||||||||||
| MC_30 | 6.47 | 4.24 | ||||||||||
| MC_40 | 4.26 | 3.60 | ||||||||||
| MC_60 | 3.33 | 3.88 | ||||||||||
| HMC_60 | 4.46 | 3.65 | ||||||||||
| HC_70 | 5.59 | 3.82 |
Beam current (nA):
| Date | 260831 | 260927 | 2610xx | 2611xx | 2612xx | 2701xx | 2702xx | 2703xx | 2704xx | 2705xx | 2706xx | 2707xx |
| LC_30 | 0.1377 | 0.1423 | ||||||||||
| LC_40 | 0.1968 | 0.2037 | ||||||||||
| LC_60 | 0.4635 | 0.4786 | ||||||||||
| MC_30 | 0.5239 | 0.5241 | ||||||||||
| MC_40 | 0.9209 | 0.9458 | ||||||||||
| MC_60 | 2.182 | 2.254 | ||||||||||
| HMC_60 | 10.55 | 10.88 | ||||||||||
| HC_70 | 29.55 | 30.64 |