Technical information
- Hitachi SU8700 Scanning Electron Microscope (SEM)
- Schottky field emission gun
- Detectors:
- In-lens SE & EsB
- E-T SE
- aSTEM
- UVD (Ultra Variable-Pressure detector)
- EDS Bruker Flatquad
- 6" load-lock
- Variable pressure capability from 5-300Pa
Tool Overview
Responsible: David Alcer, Amirreza Ghassami
Location: Q241: New EBL
License and Booking Required: Yes
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