Technical information
- Woollam alpha-SE variable angle spectroscopic ellipsometer
- Wavelength range: 390 - 900 nm
- Fixed angles: 65, 70 or 75 deg
- Max sample size: 6" diameter
- Location: Temporarily CBE lab
Tool Overview
Responsible: Peter Blomqvist
Location: Q231: CMP lab
License and Booking Required: Yes
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