Technical information
Probe station Cascade 11000B for electrical characterization with Keithley 4200A-SCS Parameter Analyzer, Agilent 4294A Precision Impedance Analyzer or your own equipment. ThermoChuck temperature control from -65°C to 150°C. The probe station microscope is connected to a light source. Purge with dry air or nitrogen.
Location: Nano-characterization, room Q261 (outside of Cleanroom, Level 2).
Tool Overview
Responsible: Surendra Vutti, David Alcer
Location: Q261: Probe station
License and Booking Required: Yes
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