Level 1 - Wet benches
EBL - Solvent Bench 111
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EVA - Solvent Bench 214
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UVL - Solvent Bench 314 (Left)
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UVL - Solvent Bench 315 (Right)
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Level 2 - Wet benches
YR Lab - Solvent Bench 40 (Left)
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YR Lab - Solvent Bench 39 (Right)
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ALD - Solvent Bench 32
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This area is still under construction and may change frequently.
Some information and links may still be missing.
Common Processes
Cleaning with Acetone/IPA
Liftoff 1165
Cleaning spinner
Edge Beam Removal - EBR