Technical information
UV-ozone cleaning system from FHR Anlagenbau GmbH. Heater temperture up to 250°C. Substrate up to 8". Process in atmospheric pressure. Location: room Q158, NANO-process lab.
Tool Overview
Responsible: Amirreza Ghassami, Anders Kvennefors
Location: Q158: EVA lab
License and Booking Required: No
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