Technical information
The flash lamp annealing system is used to generate ultrashort flashes to heat surfaces. Below the substrate holder, is a lamp heater for preheating the substrates and 2 flash lamps above for short pulse heating. Preheating up to 800 degrees C with flashing up to 4.0kV with pulse duration between 1-10 ms in a controlled vacuum environment.
Installed in EVA Lab.
No combustible materials may be used in the system, samples will be approved on a case-to-case basis.
Tool Overview
Responsible: Max Bäckström
Location: Q158: EVA lab
License and Booking Required: Yes
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