Technical information
- Hitachi SU8010 cold field emission SEM
- High resolution SEM with backscatter detection, cold trap and 2" sample load-lock
- Resolution: 1.0 nm @ 15 kV
- Detectors: in-lens SE, E-T SE and STEM
- In-situ EBIC & I-V measurements
- Mounted on an active vibration cancelling system
- Location: Q260
Tool Overview
Responsible: Peter Blomqvist, Anders Kvennefors
Location: Q260: Hitach and Zeiss SEM
License and Booking Required: Yes
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