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Technical information
  • ZEISS Gemini 500 Scanning Electron Microscope (SEM)
  • Schottky field emission gun
  • Detectors:
    • In-lens SE & EsB
    • E-T SE
    • aBSD
    • aSTEM
    • EDS and EBSD (Oxford Instruments)
  • Load-lock
  • Plasma cleaner
Tool Overview

Responsible: ~ftf-pbo & Anders Kvennefors

Location: Room Q260

License and Booking Required: Yes


Documentation

User Manuals

Process

Examples - ZEISS Gemini500

Staff Documents

Other Links

Safety Information 

View on LIMS

FAQ

User Discussion Forum




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