ZEISS Gemini 500 Scanning Electron Microscope (SEM)
Schottky field emission gun
Detectors:
In-lens SE & EsB
E-T SE
aBSD
aSTEM
EDS and EBSD (Oxford Instruments)
Load-lock
Plasma cleaner
Responsible:
~ftf-pbo
& Anders Kvennefors
Location: Room Q260
License and Booking Required: Yes
User Manuals
Process
Examples - ZEISS Gemini500
Staff Documents
Safety Information
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