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Lund Nano Lab
Thin Films
PECVD - SPTS DELTA LPX APM
Jira links
Process Development and Thin films Characterization
Created by
Amirreza Ghassami
, last updated on
2026 Jan 16
1 minute read
Baseline Testing
Thickness Uniformity
Wet Etch Tests
Breakdown Voltage
Common Processes
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