Technical information
- Acceleration Voltages: 5-30 kV.
- Pattern generator speed: 10Mhz.
- 6" Max sample size.
- Minimum resolution: 10 nm.
- Maximum probecurrent: 1nA
- Equipped with thermal field emission cathode and laser interferometer stage.
Tool Overview
Responsible: Anders Kvennefors
Location: Room Q156, EBL-Lab (Cleanroom Level 1)
License and Booking Required: Yes
Documentation