Technical information
- Acceleration Voltages: ?-? kV.
- Working Distance: ?- ? mm.
- 6" Max sample size.
- Minimum resolution: ? nm.
- Maximum write speed: ?
- Equipped with thermal field emission cathode and laser interferometer stage.
Tool Overview
Responsible: Anders Kvennefors
Location: Room Q156, EBL-Lab (Cleanroom Level 1)
License and Booking Required: Yes
Documentation
Other Links