• Acceleration Voltages: ?-? kV.
• Working Distance: ?- ? mm.
• 6" Max sample size.
• Minimum resolution: ? nm.
• Maximum write speed: ?
• Equipped with thermal field emission cathode and laser interferometer stage.

Responsible: Anders Kvennefors

Location: Room Q156, EBL-Lab (Cleanroom Level 1)

License and Booking Required: Yes

User Manuals

Process

Staff Documents

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