Responsible: Sarah McKibbin and Anders Kvennefors

Location: Room Q158, EVA-Lab (Cleanroom Level 1)

License and Booking Required: Yes

Main application: Lamination of dry film resists

• Loading plate for 4" wafers
• 65cm laminating width available
• SUEX films available
• Temperature control up to 149C

Documents for the tool

View on LIMS