• ZEISS LEO - 1560 Scanning Electron Microscope (SEM)
• Schottky field emission gun
• In-lens SE & E-T SE detectors
• Capable of 1nm resolution at 20kV
• 4" max wafer diameter loading with the load lock, 6'' max loading through the chamber door

Responsible: Alexander den Ouden & PB

Location: Room Q255, (Level 2)

License and Booking Required: Yes

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