• Acceleration Voltages: 5-30 kV.
• Pattern generator speed: 10Mhz.
• 6" Max sample size.
• Minimum resolution: 10 nm.
• Maximum probecurrent: 1nA
• Equipped with thermal field emission cathode and laser interferometer stage.

Responsible: Anders Kvennefors

Location: Room Q156, EBL-Lab (Cleanroom Level 1)

License and Booking Required: Yes

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