Versions Compared

Old Version 8

changes.mady.by.user Sarah McKibbin

Saved on

compared with

New Version Current

changes.mady.by.user Sarah McKibbin

Saved on

Key

  • This line was added.
  • This line was removed.
  • Formatting was changed.


Panel
borderColor#BFB8AF
bgColorwhite
titleColorBlack
borderWidth2
titleBGColor#DCE9EE
borderStylesolid
titleTechnical information
  • Max RPM:
  • Programmable recipes.
  • Manual and semi automatic coating available.

Panel
borderColor#BFB8AF
bgColorwhite
titleColorBlack
borderWidth2
titleBGColor#DCE9EE
borderStylesolid
titleTool Overview

Tool Responsible: George RydnemalmEmil Eriksson

Chemical Responsible: Natalia Volkova

Process Support: Sarah McKibbin

Location: Room Q161, UVL-Lab (Cleanroom Level 1)

License and Booking Required: Yes (as Solvent Bench - 314)

Main application: Resist coating




Panel
borderColor#BFB8AF
bgColorwhite
titleColorBlack
borderWidth2
titleBGColor#DCE9EE
borderStylesolid
titleDocumentation

User Manuals

Process

Staff Documents





Panel
borderColor#BFB8AF
bgColorwhite
titleColorBlack
borderWidth2
titleBGColor#DCE9EE
borderStylesolid
titleOther Links

View on LIMS





...