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titleTechnical information
  • Max RPM:
  • Programmable recipes.
  • Manual and semi automatic coating available.

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titleTool Overview

Tool Responsible: George Rydnemalm: Emil Eriksson

Chemical Responsible: Natalia Volkova

Process Support: Sarah McKibbin

Location: Room Q161, UVL-Lab (Cleanroom Level 1)

License and Booking Required: Yes (as Solvent Bench - 314)

Main application: Resist coating




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titleDocumentation

User Manuals

Process

Staff Documents

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titleOther Links
View on LIMS





Panel
borderColor#BFB8AF
bgColorwhite
titleColorBlack
borderWidth2
titleBGColor#DCE9EE
borderStylesolid
titleOther Links

View on LIMS