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title	Technical information

ZEISS LEO - 1560 Scanning Electron Microscope (SEM)
Schottky field emission gun
In-lens SE & E-T SE detectors
Capable of 1nm resolution at 20kV
4" max wafer diameter loading with the load lock, 6'' max loading through the chamber door

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title	Tool Overview

Responsible: Alexander den Ouden & PB

Location: Room Q255, (Level 2)

License and Booking Required: Yes

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title	Documentation

User Manuals

Process

Staff Documents

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title	Other Links

Safety Information

View on LIMS

FAQ

User Discussion Forum