BEGIN:VCALENDAR
VERSION:2.0
PRODID:-//Lund Nano Lab//LIMS Tool 96//EN
CALSCALE:GREGORIAN
METHOD:PUBLISH
BEGIN:VEVENT
UID:booking-400846@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260518T100000
DTEND:20260518T110000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – L-E. Wernersso
 n
DESCRIPTION:Log status: Completed
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-400986@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260518T140000
DTEND:20260518T233000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – Maintenance
DESCRIPTION:Log status: Not Started
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-400947@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260519T070000
DTEND:20260519T103000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – L-E. Wernersso
 n
DESCRIPTION:Log status: Completed
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-401053@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260519T140000
DTEND:20260519T183000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – Maintenance
DESCRIPTION:Log status: Not Started
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-401090@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260521T130000
DTEND:20260521T153000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – Baseline
DESCRIPTION:Log status: Not Started
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-401118@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260521T160000
DTEND:20260521T193000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – L-E. Wernersso
 n
DESCRIPTION:Log status: Completed
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-401241@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260522T120000
DTEND:20260522T160000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – WISE3DXnano
DESCRIPTION:Log status: Completed
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-401317@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260525T100000
DTEND:20260525T120000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – L-E. Wernersso
 n
DESCRIPTION:Log status: Completed
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-401468@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260526T120000
DTEND:20260526T143000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – ATLAS-VNWRFT20
 23-NordAmps
DESCRIPTION:Log status: Completed
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-401564@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260526T160000
DTEND:20260526T173000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – Linke.Miljö.V
 R2019-02435
DESCRIPTION:Log status: Completed
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-401588@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260526T173000
DTEND:20260527T000000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – Maintenance
DESCRIPTION:Log status: Not Started
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-401587@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260527T000000
DTEND:20260527T103000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – Maintenance
DESCRIPTION:Log status: Not Started
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-401561@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260527T120000
DTEND:20260527T143000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – 3DIIIV
DESCRIPTION:Log status: Completed
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-401618@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260527T143000
DTEND:20260527T153000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – Linke.Miljö.V
 R2019-02435
DESCRIPTION:Log status: Not Started
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-401386@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260527T163000
DTEND:20260527T190000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – WISE3DXnano
DESCRIPTION:Log status: Completed
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-401581@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260529T083000
DTEND:20260529T110000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – Baseline
DESCRIPTION:Log status: Not Started
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-401991@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260601T143000
DTEND:20260601T160000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – Linke.Miljö.V
 R2019-02435
DESCRIPTION:Log status: Not Started
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-401695@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260603T090000
DTEND:20260603T113000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – WISE3DXnano
DESCRIPTION:Log status: Completed
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-402085@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260603T140000
DTEND:20260603T160000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – L-E. Wernersso
 n
DESCRIPTION:Log status: Not Started
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-402087@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260604T123000
DTEND:20260604T163000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – 3DIIIV
DESCRIPTION:Log status: Completed
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-402217@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260605T080000
DTEND:20260605T143000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – Maintenance
DESCRIPTION:Log status: Not Started
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-401792@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260605T143000
DTEND:20260605T170000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – Baseline
DESCRIPTION:Log status: Not Started
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-402346@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260606T130000
DTEND:20260606T143000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – WISE3DXnano
DESCRIPTION:Log status: Completed
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-402417@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260608T110000
DTEND:20260608T130000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – Baseline
DESCRIPTION:Log status: Not Started
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-402537@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260609T140000
DTEND:20260609T180000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – Maintenance
DESCRIPTION:Log status: Not Started
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-402569@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260610T110000
DTEND:20260610T160000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – Maintenance
DESCRIPTION:Log status: Not Started
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-402614@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260611T093000
DTEND:20260611T100000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – Maintenance
DESCRIPTION:Log status: Not Started
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-402555@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260611T140000
DTEND:20260611T163000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – Real ALE
DESCRIPTION:Log status: Not Started
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-402277@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260612T100000
DTEND:20260612T120000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – Equipment trai
 ning
DESCRIPTION:Log status: Not Started
STATUS:CONFIRMED
END:VEVENT
BEGIN:VEVENT
UID:booking-402580@lundnanolab.nano.lu.se
DTSTAMP:20260613T163810Z
DTSTART:20260612T133000
DTEND:20260612T163000
SUMMARY:Etcher APEX SLR F-based ICP-RIE – Plasma-Therm – Baseline
DESCRIPTION:Log status: Not Started
STATUS:CONFIRMED
END:VEVENT
END:VCALENDAR